METHOD FOR REDUCING ROUGHNESS OF A THICK INSULATING LAYER,申请号EP20060777736-传众专利搜索

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发明名称	METHOD FOR REDUCING ROUGHNESS OF A THICK INSULATING LAYER
摘要
申请公布号	EP1902463(B1)	申请公布日期	2011.09.14
申请号	EP20060777736	申请日期	2006.07.12
申请人	S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES	发明人	DAVAL, NICOLAS;KERDILES, SEBASTIEN;AULNETTE, CECILE
分类号	H01L21/762	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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