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发明名称
COLLOIDAL SILICA SLURRY FOR POLISHING EDGE OF SILICON WAFER
摘要
申请公布号
KR20110100548(A)
申请公布日期
2011.09.14
申请号
KR20100019600
申请日期
2010.03.04
申请人
ACE NANOCHEM CO., LTD.
发明人
KIM, MOON SUNG;PARK, CHUL JIN;HONG, CHANG JIN;KIM, GYU SU;AN, SANG MIN;KIM, HYE JIN
分类号
C09K3/14
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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