| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the formation of a row of exposure patterns on a part between mutually adjacent exposure areas at the outside of a plurality of exposure areas set in a transfer direction. <P>SOLUTION: An aligner is equipped with: a mask stage 2 which is arranged at an upper part of a transfer means 1, has a photomask 11 thereon, on which photomask the same number of rows of mask patterns as the number of a plurality of exposure areas, set at a prescribed interval along the transfer direction A of a color filter substrate 8, are provided at a certain interval, and can be moved in the direction B opposite to the transfer direction A; an exposure light source 3 which is lit at any time during an exposure period to the color filter substrate 8 and irradiates one of the plurality of rows of mask patterns; a projection lens 4 for projecting the row of mask patterns of the photomask 11 onto the exposure area of the color filter substrate 8; and a control means 6 for switching the rows of mask patterns by moving the mask stage 2 at a prescribed speed when a front edge part in each transfer direction of the plurality of exposure areas is detected. <P>COPYRIGHT: (C)2007,JPO&INPIT |
