| 摘要 |
PROBLEM TO BE SOLVED: To collect dust in a pod to an exhaust side by lowering back pressure on the exhaust side. SOLUTION: The substrate storage pod includes a body container having a hollow part storing the substrate and an opening, a lid member shielding the opening, an exhaust port exhausting replacement gas in the hollow part of the body container and exhaust space which is communicated to the exhaust port and is defined in the hollow part. The exhaust space is defined in the hollow part with a porous partitioning member having a plurality of holes and an inner surface of the body container. COPYRIGHT: (C)2011,JPO&INPIT |
