| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measurement of the number of particles, capable of accurately measuring the number of particles generated by a specific factor. SOLUTION: A laser light 25 is allowed to enter a main exhaust line 16 through a glass window 24, and each scattered light L1, L2 generated from each particle P1, P2 intersecting the laser light 25 is received by a photodetector 21, and the number of particles is measured based on the received scattered light. In this case, unmoving particles P2 are regarded as dirt adhering onto the glass window 24, and the number of unmoving particles P2 is removed from the number of particles measured in the main exhaust line 16. COPYRIGHT: (C)2011,JPO&INPIT
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