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发明名称
METHOD AND APPARATUS FOR PRODUCING SMALL STRUCTURES
摘要
申请公布号
EP2064364(A4)
申请公布日期
2011.09.14
申请号
EP20070828861
申请日期
2007.09.21
申请人
FUJIREBIO INC.
发明人
HIMMELHAUS, MICHAEL;WORSFOLD, OLIVER;WHITEHOUSE, CONOR, D.
分类号
C23C14/04
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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