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发明名称
METHODS FOR IMPROVING THE QUALITY OF STRUCTURES COMPRISING SEMICONDUCTOR MATERIALS
摘要
申请公布号
EP2364504(A1)
申请公布日期
2011.09.14
申请号
EP20090753298
申请日期
2009.11.13
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
ARENA, CHANTAL
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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