| 摘要 |
<p>In a temperature control system, a plurality of heaters arranged in a plurality of rows and columns on a heat plate, heaters in the same row are connected to a common wiring, and heaters in the same columns are connected to a common wiring. The wirings of the rows are connected to the side of one pole of an AC power source via switching elements, respectively. The wirings of the columns are connected to the side of the other pole of the AC power source via switching elements, respectively. Firing pulse output (firing instruction) is output to a target heater by optimal cycle control with a controller. When updating an accumulated output error in the optimal cycle control of the target heater, an interference operation amount is subtracted from the accumulated output error.</p> |
