发明名称 |
Method for simultaneous electronic lapping guide (ELG) and perpendicular magnetic recording (PMR) pole formation |
摘要 |
A method for providing a perpendicular magnetic recording (PMR) head is disclosed. The method comprises: providing a stop layer; providing an insulating layer over the stop layer; forming a pole trench in the insulating layer by performing a reactive ion etching (RIE) process in the insulating layer over the stop layer; forming an electronic lapping guide (ELG) in the insulating layer by performing the RIE process in the insulating layer over the stop layer; and providing a PMR pole in which at least a portion of the PMR pole resides in the pole trench.
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申请公布号 |
US8018678(B1) |
申请公布日期 |
2011.09.13 |
申请号 |
US20080324442 |
申请日期 |
2008.11.26 |
申请人 |
WESTERN DIGITAL (FREMONT), LLC |
发明人 |
ZHANG JINQIU;CHEN TSUNG YUAN;RUDY STEVEN C. |
分类号 |
G11B5/147 |
主分类号 |
G11B5/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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