Silicon substrate and chip package structure with silicon base having stepped recess for accommodating chip

摘要

A semiconductor process is provided. First, a silicon base is provided. Next, a surface of the silicon base is partially exposed and at least a stair structure is formed on the silicon base by etching the surface of the silicon base. The stair structure has a first notch with a first depth and a second notch with a second depth. The first depth is smaller than the second depth, and a diameter of the first notch is larger than a diameter of the second notch. A final insulating layer and a metal seed layer are sequentially formed on the stair structure. A patterned photoresist layer is formed on the metal seed layer. A circuit layer coving exposed portions of the metal seed layer located above the first notch is formed. The patterned photoresist layer and portions of the metal seed layer disposed below the patterned photoresist layer are then removed.