发明名称 Gallium nitride-based epitaxial wafer and method of fabricating epitaxial wafer
摘要 A gallium nitride-based epitaxial wafer for a nitride light-emitting device comprises a gallium nitride substrate having a primary surface, a gallium nitride-based semiconductor film provided on the primary surface, and, an active layer provided on the semiconductor film, the active layer having a quantum well structure. A normal line of the primary surface and a C-axis of the gallium nitride substrate form an off angle with each other. The off angle monotonically increases on the line that extends from one point to another point through a center point of the primary surface. The one point and the other point are on an edge of the primary surface, and indium contents of the well layer defined at n points on the line monotonically decrease in a direction from the one point to the other point. The thickness values of the well layer defined at the n points monotonically increase in the direction.
申请公布号 US8018029(B2) 申请公布日期 2011.09.13
申请号 US20090565290 申请日期 2009.09.23
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 YOSHIZUMI YUSUKE;UENO MASAKI;NAKAMURA TAKAO
分类号 H01L29/20;H01L33/00 主分类号 H01L29/20
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