| 摘要 |
A piezoelectric-driven diaphragm pump is comprised of a driving unit (1) having a driving diaphragm (12) and a first housing (11), a replaceable driven unit (2) having a driven film (241) and a second housing (21), and a fixing unit (3) for fixing the driven unit (2) to the driving unit (1). A vibration transmitting face (14) of the driving diaphragm (12) from which displacement of the driving diaphragm (12) is transmitted to the driven film (241) and a vibration transmitted face (241a) of the driven film (241) to which the displacement of the driving diaphragm is transmitted are not parallel to a reference plane (11b) of the first housing (11) which faces the second housing (21), and the vibration transmitting face (14b) of the driving diaphragm (12) contacts with entire of the vibration transmitted face (241a) of the driven film (241). Thereby, the displacement of the driving diaphragm (12) is efficiently transmitted to the driven film (241), so that a capacity of a pump room (25) can be varied largely.
|
