发明名称 Imagers with contact plugs extending through the substrates thereof and imager fabrication methods
摘要 Methods for fabricating photoimagers, such as complementary metal-oxide-semiconductor (CMOS) imagers, include fabricating image sensing elements, transistors, and other low-elevation features on an active surface of a fabrication substrate, and fabricating contact plugs, conductive lines, external contacts, and other higher-elevation features on the back side of the fabrication substrate. Imagers with image sensing elements and transistors on the active surface and contact plugs that extend through the substrate are also disclosed, as are electronic devices including such imagers.
申请公布号 US8017982(B2) 申请公布日期 2011.09.13
申请号 US20070761904 申请日期 2007.06.12
申请人 MICRON TECHNOLOGY, INC. 发明人 KIRBY KYLE K.;OLIVER STEVE
分类号 H01L31/062 主分类号 H01L31/062
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