发明名称 Surface acoustic wave device and method of fabricating the same
摘要 A surface acoustic wave device includes a piezoelectric substrate; comb electrodes provided on a first surface of the piezoelectric substrate; and an insulating film provided on at least one of the first surface of the piezoelectric substrate and a second surface thereof opposite to the first surface, the insulating film having a thickness greater than that of the piezoelectric substrate and having a linear expansion coefficient smaller than that of the piezoelectric substrate in a direction of propagation of a surface acoustic wave.
申请公布号 US8018120(B2) 申请公布日期 2011.09.13
申请号 US20090366971 申请日期 2009.02.06
申请人 TAIYO YUDEN CO., LTD. 发明人 MORIYA AKIRA;KAWACHI OSAMU
分类号 H01L41/08 主分类号 H01L41/08
代理机构 代理人
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