| 发明名称 |
MANUFACTURING METHOD FOR VANADIUM DIOXIDE THERMOCHROMIC FILM BY MEANS OF THERMEAL ANNEALING |
| 摘要 |
A manufacturing method for vanadium dioxide thermochromic film includes applying amorphous vanadium dioxide to substrate in the vacuum chamber layer heated to 200-250 ° C and its crystallization by means of thermal annealing at the temperature of 300-340 ° C for 20-60 min. An amorphous vanadium dioxide layer is applied by means of vanadium target magnetron sputtering in a gas mixture. |
| 申请公布号 |
UA62706(U) |
申请公布日期 |
2011.09.12 |
| 申请号 |
UA20110001766U |
申请日期 |
2011.02.15 |
| 申请人 |
V. LASHKARIOV SEMICONDUCTOR PHYSICS INSTITUTE OF THE NAS OF UKRAINE |
发明人 |
ROMANIUK BORYS MYKOLAIOVYCH;MELNYK VIKTOR PAVLOVYCH;KHATSEVYCH IHOR MYROSLAVOVYCH;HOLTVIANSKYI YURII VASYLIOVYCH;NIKIRIN VIKTOR ANDRIIOVYCH;POPOV VALENTYN HEORHIIOVYCH;HUDYMENKO OLEKSANDR YOSYPOVYCH;OBEREMOK OLEKSANDR STEPANOVYCH |
| 分类号 |
G02F1/015 |
主分类号 |
G02F1/015 |
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