METHOD OF ACCELERATING MEASUREMENT OF SURFACE TOPOGRAPHY FOR SCANNING PROBE MICROSCOPE

摘要

FIELD: physics. ^ SUBSTANCE: in the method of measuring surface topography and properties for a scanning probe microscope, scanning is carried out in a direction parallel the surface of the sample on a given path. Data are recorded during forward and backward pass and in order to generate a signal which controls displacements perpendicular to the surface of the sample, an array of values of the control signal recorded on the previous scanning line is used together with an array of values of the mismatch error signal, multiplied by the calibration coefficient. ^ EFFECT: high speed of scanning and reduced measurement errors. ^ 12 cl, 8 dwg