发明名称 METHOD FOR PRODUCING SILICON CARBIDE SUBSTRATE
摘要 A support section (30c) made from silicon carbide has undulations on at least a portion of the primary surface (F0) thereof. The support section (30c) and at least one monocrystalline substrate (11) are stacked in a manner so that the back surface (B1) of each of the at least one monocrystalline substrate (11) formed from silicon carbide makes contact with the primary surface (F0) of the support section (30c) that has undulations formed. In order to join the back surface (B1) of each of the at least one monocrystalline substrate (11) to the support section (30c), the support section (30c) and the at least one monocrystalline substrate (11) are heated in a manner such that the temperature of the support section (30c) exceeds the sublimation temperature of silicon carbide, and the temperature of each of the at least one monocrystalline substrate (11) is less than the temperature of the aforementioned support section (30c).
申请公布号 CA2765310(A1) 申请公布日期 2011.09.09
申请号 CA20102765310 申请日期 2010.09.28
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 NISHIGUCHI, TARO;SASAKI, MAKOTO;HARADA, SHIN;OKITA, KYOKO;INOUE, HIROKI;NAMIKAWA, YASUO
分类号 C30B29/36;C30B33/06;H01L21/203 主分类号 C30B29/36
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