SINGLE CRYSTAL SUBSTRATE, PRODUCTION METHOD FOR SINGLE CRYSTAL SUBSTRATE, PRODUCTION METHOD FOR SINGLE CRYSTAL SUBSTRATE WITH MULTILAYER FILM, AND DEVICE PRODUCTION METHOD

摘要

In order to correct warping that occurs as a result of the formation of a multilayer film, a single crystal substrate is disclosed that has a heat denatured layer disposed within either a first region (10D) or a second region (10U), which are obtained by dividing the substrate into two equal parts in the thickness direction, and that is curved in a manner such that the surface of the region in which the heat denatured layer is provided forms a convex. Also disclosed are a production method therefor, a production method for a single crystal substrate with a multilayer film that uses said single crystal substrate, and a device production method using said production method.