发明名称 |
SURFACE MEASUREMENT INSTRUMENT AND CALIBRATION THEREOF |
摘要 |
A method of calibrating a surface measurement instrument comprises: rotating a work piece having an undulating surface on a turntable of a metrological apparatus; measuring the surface of the work piece at a plurality of rotational positions; analysing the results of the measurement to determine parameters describing an error causing characteristic of the metrological apparatus; and using the determined parameters to correct measurement data for the error causing characteristic of the metrological apparatus. |
申请公布号 |
WO2011107784(A1) |
申请公布日期 |
2011.09.09 |
申请号 |
WO2011GB50400 |
申请日期 |
2011.03.01 |
申请人 |
SCOTT, PAUL J.;TAYLOR HOBSON LIMITED |
发明人 |
SCOTT, PAUL J. |
分类号 |
G01B5/252;B23Q3/18;G01B7/312 |
主分类号 |
G01B5/252 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|