| 摘要 |
<p>Provided is a high-resolution scanning electron microscope with minimal aberration, and equipped with an electro-optical configuration that can form a tilted beam having wide-angle polarization and a desired angle, without interfering with an electromagnetic lens. Also provided is a measurement method using the same. In the scanning electron microscope, an electromagnetic deflection device (201) is disposed above an electromagnetic lens (207), and a control electrode (202) that accelerates or decelerates electrons is provided so as to overlap (in such a manner that the height positions overlap with respect to the vertical direction) with the electromagnetic deflection device (201). In wide field polarization, electrodes are accelerated, and in tilted beam formation, electrons are decelerated.</p> |
