摘要 |
Embodiments of the present invention generally relate to lithium-ion batteries, and more specifically, to a system and method for fabricating such batteries using thin-film processes that form three-dimensional structures. In one embodiment, an anodic structure used to form an energy storage device is provided. The anodic structure comprises a flexible conductive substrate, a plurality of conductive microstructures formed on the conductive substrate, comprising a plurality of columnar projections and dendritic structures formed over the plurality of columnar projections and a plurality of tin particles formed on the plurality of conductive microstructures. In another embodiment, the anodic structure further comprises a tin nucleation layer comprising tin particles formed on the flexible conductive substrate between the flexible conductive substrate and the plurality of conductive microstructures. |
申请人 |
APPLIED MATERIALS, INC.;LOPATIN, SERGEY, D.;BREVNOV, DMITRI, A.;WANG, CONNIE, P.;BACHRACH, ROBERT, Z. |
发明人 |
LOPATIN, SERGEY, D.;BREVNOV, DMITRI, A.;WANG, CONNIE, P.;BACHRACH, ROBERT, Z. |