HARD DISK MEDIA INSPECTION DEVICE AND INSPECTION METHOD

摘要

Disclosed is a hard disk media inspection device and inspection method which reduces the stray light component of spectral reflection intensity, and accurately detects pattern shapes and positively detects pattern flaws on a patterned disk. The hard disk media inspection device illuminates the surface of a hard disk drive with a pattern formed thereupon with light containing a plurality of wavelengths; adjusts the intensity of reflected light detected by each wavelength using the stray light component occurring in a detection unit which detects light reflected from the hard disk media; and uses the adjusted intensity of reflected light to calculate spectral reflectance. Further, the intensity of light reflected from the surface of the hard disk media is detected for each wavelength, with the short-wavelength regions of reflected light cut and uncut, and the adjustment is made based on the difference between the two intensities of reflected light.