| 摘要 |
A substrate storage container configured so that a conveyance unit is more easily mounted to a mounting mechanism of the container body, the conveyance unit is less likely to come off the mounting mechanism, and liquid such as cleaning water is less likely to remain in the mounting mechanism and the conveyance unit. A substrate storage container is configured in such a manner that a mounting mechanism (20) is provided to the ceiling (2) of the container body (1) for storing semiconductor wafers, and that a robotic flange (31), which serves as a conveyance unit (30), is removably mounted to the mounting mechanism (20). The mounting mechanism (20) is provided with pairs of support rails (21) which are provided to the ceiling (2) at positions corresponding to each other, guide sections (23) which are provided to the ceiling (2), and interference and engagement sections (24) which are formed on each of the guide sections (23). Each of the guide section (23) and each of the interference and engagement sections (24) are combined so that the front ends thereof form a bifurcated section (25). The conveyance unit (30) is provided with unit bodies (32) supported between the pairs of support rails (21). Flow holes (36) for fluid are formed in the unit bodies (32). The unit bodies (32) incorporate elastically deformable engagement sections (35) which interfere with the bifurcated sections (25). |
