METHOD FOR DISPLAYING SUPERIMPOSED ELECTRON MICROSCOPE IMAGE AND OPTICAL IMAGE

摘要

The main characteristic of the method is to align an electron beam that is incident upon a sample and the optical axis from an optical image device, using a combination mirror/reflected electron detector in order to achieve the following three objectives: to minimize the misalignment of the field of view of an electron microscope image and an optical image; to add color information obtained by the optical image device, which is equipped with a digital image function, to the electron microscope image; and to simplify the structure of the device as a whole. By adding an optical mirror function to a reflected electron detector, the overall structure of the device is simplified, and the beam axis of an electron microscope and the optical axis of the optical image device are aligned.