发明名称 PROCEDE DE RESTAURATION D'UN ELEMENT EN CUIVRE
摘要 A method for modifying crystalline structure of a copper element with a planar surface, including: a) producing a copper standard having large grains, wherein the standard includes a planar surface, b) reducing roughness of the planar surfaces to a roughness of less than 1 nm, c) cleaning the planar surfaces, d) bringing the two planar surfaces into contact, and e) annealing.
申请公布号 FR2947571(B1) 申请公布日期 2011.09.09
申请号 FR20090054610 申请日期 2009.07.03
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;STMICROELECTRONICS (CROLLES 2) SAS 发明人 DI CIOCCIO LEA;GUEGUEN PIERRIC;RIVOIRE MAURICE
分类号 C30B33/00;C30B1/00;H01L21/28;H01L21/44;H01L23/52 主分类号 C30B33/00
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