发明名称 SUBSTRATE TRANSPORT CARRIER
摘要 A transport container for substrates such as semiconductor wafers and solar cell substrates includes a cover and a base having a plurality of side walls including movable wall portions with vertically extending hinges or hinges that provide a pivot about a vertical axis. The hinges can be resilient movable polymer portions such as living hinges and can have an unconnected upper edge and an unconnected lower edge to allow the movable wall portions to move inwardly relative to a floor of the base. The cover can include a base engagement portion configured as a cam portion that engages a cover engagement portion on the movable wall portions as the cover is inserted onto the base. As the cam portions of the cover engage the cover engagement portions, the cam portions move the wall inwardly relative to the base to align the substrates.
申请公布号 WO2011109537(A2) 申请公布日期 2011.09.09
申请号 WO2011US26892 申请日期 2011.03.02
申请人 ENTEGRIS, INC.;BURNS, JOHN;KING, JEFFREY, J. 发明人 BURNS, JOHN;KING, JEFFREY, J.
分类号 主分类号
代理机构 代理人
主权项
地址