| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator and an actuator structure, wherein the actuator using a piezoelectric body is prevented from warping, to improve the yield, and to ensure high reliability and durability. <P>SOLUTION: The actuator 50 is provided with, on a first surface side of the diaphragm 24: a piezoelectric layer 30 receiving stress from a diaphragm 24 of 0.5 to 20 μm in thickness; and a pair of electrodes 26 and 33 facing each other across the piezoelectric layer 30. Further, a stress adjusting layer 25, which receives stress in the same direction as that of the stress that the piezoelectric layer 30 receives, is provided on a second surface side of the diaphragm 24 on the opposite side to the first surface where the piezoelectric layer 30 is formed. <P>COPYRIGHT: (C)2011,JPO&INPIT |
