| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity detecting element which includes a double-T-shaped piezoelectric vibrating piece with a thickness in a Z-axis direction and can detect an angular velocity around an X-axis. <P>SOLUTION: In the physical quantity detecting element 100, one 30a and the other 30b of a pair of first driving vibration arms bend and vibrate in the Z-axis direction with a first phase, and one 40a and the other 40b of a pair of second driving vibration arms bend and vibrate in the Z-axis direction with a second phase reverse to the first phase. The pair of the first driving vibration arms 30a and 30b and the pair of the second driving vibrating arms 40a and 40b vibrate in a Y-axis direction with reverse phases by Coriolis force generated in accordance with the angular velocity of rotation around the X-axis. One 20a and the other 20b of a pair of driving vibration arms bend and vibrate in the X-axis direction with reverse phases in accordance with the vibration of the pair of the first driving vibration arms 30a and 30b and the pair of the second driving vibration arms 40a and 40b in the Y-axis direction. <P>COPYRIGHT: (C)2011,JPO&INPIT |
