发明名称 |
VACUUM PROCESSING APPARATUS AND RECORDING MEDIUM |
摘要 |
<p>The present invention provides an efficient transferring control method in a vacuum processing apparatus of a linear tool in which plural vacuum robots are arranged in transferring mechanical units to which process chambers are connected and processing-target members are passed and received among the plural vacuum robots. In addition, the present invention provides a vacuum processing apparatus in which there are provided plural controlling methods, and a unit which determines whether rates of the transferring robots are to be controlled or rates of the process chambers are to be controlled on the basis of processing time of each processing-target member and switches the controlling method in accordance with a site whose rate is controlled.</p> |
申请公布号 |
KR20110099629(A) |
申请公布日期 |
2011.09.08 |
申请号 |
KR20110010124 |
申请日期 |
2011.02.01 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
NAKATA TERUO;KONDO HIDEAKI;TAUCHI SUSUMU;NOGI KEITA |
分类号 |
H01L21/677;B25J9/16;G05B19/418 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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