| 摘要 |
PROBLEM TO BE SOLVED: To provide a resonant vibration device having stable characteristics by reducing the variation and uniformity of the resonance frequencies of a vibration device due to an internal reaction occurring in an airtight sealing package in joining a sealing substrate. SOLUTION: The resonant vibration device includes: a substrate where a vibration part is formed; and a sealing substrate joined to the substrate for airtight sealing. Separately from a joining frame 101 to join the sealing substrate to the substrate where the vibration part is formed, a support frame 103 supporting the vibration part is provided. The joining frame 101 and the support frame 103 are connected by members having smaller rigidity than the respective frames. COPYRIGHT: (C)2011,JPO&INPIT
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