| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing the master disk of an optical disk capable of transferring a concave/convex pattern, which is formed on an inorganic resist layer by use of a thermochemical reaction, to a stamper without causing a minute concave defect in a surface by an electroforming process. SOLUTION: The method for manufacturing the master disk of the optical disk capable of transferring the concave/convex pattern to the stamper includes a first film-forming step which film-forms a first resist layer 101 on a substrate 100, an exposure step which selectively exposes the film-formed first resist layer 101 in association with the concave/convex pattern of a signal for recording of the optical disk, a development step which develops the exposed substrate to form the concave/convex pattern 102 on the substrate 100 on which the first resist layer 101 is film-formed, and a second film-forming step which film-forms a second resist layer 103 containing the oxide of a transition metal with a less oxygen content than the first resist layer 101 on the first resist layer 101 of the substrate on which the concave/convex pattern 102 is formed. COPYRIGHT: (C)2011,JPO&INPIT
|
