| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an operation method of a heating device of low frequency of generation of damage due to heating of a heated object, and high energy efficiency. <P>SOLUTION: In this heating device including a housing section 25 for housing the heated object 29 in a housing chamber 23 surrounded by a wall section 25 having an inner wall face 24 made of a material of thermal emissivity of 0.7 or more in wavelengths of 1.6-2.6 μm, and a heating means 28 for heating the inside of the housing chamber while controlling a temperature rising speed of an atmospheric temperature on the basis of the atmospheric temperature in the housing chamber 23 and a temperature distribution in the heated object, the heated object 29 is housed in the housing chamber 23, and the heating device 21 is operated to heat the inside of the housing chamber 23 while controlling the temperature rising speed of the atmospheric temperature by the heating means 28 while keeping 0.9-1.0 times of a maximum permissible value, with respect to the atmospheric temperature on which the maximum permissible value of the temperature distribution is determined for preventing problems in the heated object 29. <P>COPYRIGHT: (C)2011,JPO&INPIT |
