| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To fill a recess part of an area having an alignment mark in a mold, with an uncured resin, and to detect the alignment mark, compatibly. <P>SOLUTION: An imprint device is equipped with: a discharging mechanism 7 for discharging the uncured resin to a substrate 2; a detector 9 for detecting the alignment mark disposed on a pattern face of a mold 3; and a control part C. The pattern face includes a first area having a device pattern and a second area having the alignment mark, and when the uncured resin and the mold are pressed to each other, the pattern face is configured so that a second time when a recess part of the second area is charged with the uncured resin is after a first time when a recess part of the first area is charged with the uncured resin. The control part C controls the discharging mechanism 7 to discharge to the substrate 2 the uncured resin of the amount with which the recess part of the device pattern and the recess part of the alignment mark are filled, and controls the detector 9 to detect the alignment mark between the first time and the second time. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
