| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for acquiring a position with a confocal Fabry-Perot interferometer. SOLUTION: The device for acquiring the position includes the confocal Fabry-Perot interferometer 200. The confocal Fabry-Perot interferometer includes the first resonator mirror (1), the second resonator mirror (2), and a folding mirror (7) arranged on an optical path between the first resonator mirror (1) and the second resonator mirror (2). COPYRIGHT: (C)2011,JPO&INPIT
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