| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing device capable of editing easily a pattern file, and reducing editing errors of the pattern file, by displaying and editing the pattern file as a spread sheet using a rectangular region partitioned by rows and columns as a minimum unit, and by performing automatically format check of the pattern file. SOLUTION: This semiconductor testing device for performing a test by giving a test signal generated based on pattern data to a test object includes a pattern editor means for describing the pattern data on the spread sheet constituted by using the rectangular region partitioned by rows and columns as the minimum unit, creating the pattern file of a spread sheet form, and editing the pattern file. COPYRIGHT: (C)2011,JPO&INPIT
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