| 发明名称 |
SYSTEMS AND METHODS FOR WAFER EDGE FEATURE DETECTION AND QUANTIFICATION |
| 摘要 |
Disclosed herein is a method to enhance detection and quantification of features in the wafer edge/wafer roll off regions. Modifications and improvements have been made to earlier methods which enable improved accuracy and increased scope of feature detection.
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| 申请公布号 |
US2011218762(A1) |
申请公布日期 |
2011.09.08 |
| 申请号 |
US201113028074 |
申请日期 |
2011.02.15 |
| 申请人 |
KLA-TENCOR CORPORATION |
发明人 |
CHEN HAIGUANG;SINHA JAYDEEP |
| 分类号 |
G06F15/00;G01B1/00 |
主分类号 |
G06F15/00 |
| 代理机构 |
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