| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater capable of contributing to the improvement of operation characteristics. SOLUTION: The ceramic heater is provided with a first ceramic board, a second ceramic board fitted on the first ceramic board with a thermal conductivity larger than that of the first ceramic board, and a resistive heating element installed between the first ceramic board and the second ceramic board. COPYRIGHT: (C)2011,JPO&INPIT
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