发明名称 |
THIN FILM TRANSISTOR STRUCTURE, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC DEVICE |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high-performance thin film transistor structure which is easily manufactured. <P>SOLUTION: A sub stack body 6 is formed, in a position where gate electrode wiring 3 and source electrode wiring 8 overlap, between them. The sub stack body 6 including: an insulating layer 5X which is arranged adjacent to a gate insulating layer 4; and a semiconductor layer 5Y which is not arranged adjacently, is disposed on the gate insulating layer 4 in the same process as that of a main stack body 5 of a TFT 11. The insulating layer 5X and the semiconductor layer 5Y are obtained by the phase separation of a film which is formed by using a solution containing an insulating material and a semiconductor material. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
申请公布号 |
JP2011176008(A) |
申请公布日期 |
2011.09.08 |
申请号 |
JP20100037284 |
申请日期 |
2010.02.23 |
申请人 |
SONY CORP |
发明人 |
YAGI GEN;ONO HIDEKI;SASAKI MARI |
分类号 |
H01L29/786;G09F9/30;H01L21/336;H01L51/05;H01L51/40 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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