PIEZOELECTRIC FILM, PIEZOELECTRIC DEVICE, LIQUID EJECTION APPARATUS, AND METHOD OF PRODUCING PIEZOELECTRIC FILM

摘要

A piezoelectric film is formed on a surface of a substrate by a vapor deposition process without generating grain boundaries which are substantially parallel to the surface of the substrate and are caused by lamination. A normal of a (100) plane of each of crystals constituting the piezoelectric film is inclined from a normal of the surface of the substrate by an angle of not smaller than 6° and not larger than 36°.