发明名称 SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 Certain embodiments provide a method for manufacturing a semiconductor light emitting device, including: providing a first stack film on a first substrate, the first stack film being formed by stacking a p-type nitride semiconductor layer, an active layer having a multiquantum well structure of a nitride semiconductor, and an n-type nitride semiconductor layer in this order; forming an n-electrode on an upper face of the n-type nitride semiconductor layer; and forming a concave-convex region on the upper face of the n-type nitride semiconductor layer by performing wet etching on the upper face of the n-type nitride semiconductor layer with the use of an alkaline solution, except for a region in which the n-electrode is formed.
申请公布号 US2011215292(A1) 申请公布日期 2011.09.08
申请号 US20100874425 申请日期 2010.09.02
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ZAIMA KOTARO;GOTODA TORU;OKA TOSHIYUKI;NUNOUE SHINYA
分类号 H01L33/04;H01L21/18 主分类号 H01L33/04
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