发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 Some embodiments of the present invention relate to a semiconductor device and a method of manufacturing a semiconductor device capable of preventing the deterioration of electrical characteristics. A p-type collector region is provided on a surface layer of a backside surface of an n-type drift region. A p+-type isolation layer for obtaining reverse blocking capability is provided at the end of an element. In addition, a concave portion is provided so as to extend from the backside surface of the n-type drift region to the p+-type isolation layer. A p-type region is provided and is electrically connected to the p+-type isolation layer. The p+-type isolation layer is provided so as to include a cleavage plane having the boundary between the bottom and the side wall of the concave portion as one side.
申请公布号 US2011215435(A1) 申请公布日期 2011.09.08
申请号 US201113038349 申请日期 2011.03.01
申请人 FUJI ELECTRIC HOLDINGS CO., LTD. 发明人 WAKIMOTO HIROKI;IGUCHI KENICHI;YOSHIKAWA KOH;NAKAJIMA TSUNEHIRO;TANAKA SHUNSUKE;OGINO MASAAKI
分类号 H01L29/06;H01L21/302;H01L21/78 主分类号 H01L29/06
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