| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sensor device which readily detects breakages. <P>SOLUTION: The sensor device includes a substrate 65 having a diaphragm 100. The diaphragm 100 includes a wiring 111 for a sensor electrically connected to a plurality of electrodes 120 for sensors; a sensor element 110 electrically connected to the wiring 111 for the sensor and is formed to be capable of measuring a specific physical quantity; and a breakage detecting wiring 150, that is electrically connected to a plurality of breakage detection electrodes 140 and is formed so that it is disconnected by a breakage generated in the diaphragm 100. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
