| 摘要 |
PROBLEM TO BE SOLVED: To provide a reference device which enables high-accuracy measurement conforming to actual measurement, not depending on restrictions on structure, or others, and an inspection method using the same. SOLUTION: The reference device 1 includes a body 3, a guide mechanism provided linearly in the body 3, a reference piece 7 which can be moved along the guide mechanism and fixed, and a length measuring means which is provided in the body 3 and measures a position of the reference piece 7. The position of the reference piece 7 when the reference piece 7 is moved to a different position along the guide mechanism is measured by the length measuring means, while the position of the reference piece 7 when the reference piece 7 is moved to this different position is measured by a measuring instrument, so that a difference between a measured value of each position of the reference piece 7 measured by the length measuring means and a measured value of each position of the reference piece 7 measured by the measuring instrument is determined. COPYRIGHT: (C)2011,JPO&INPIT |
