| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromirror array which prevents an influence of warpage of a mirror substrate on micromirrors. SOLUTION: The mirror substrate 13 is provided with stress-buffering parts 16, thereby reducing the influence of the warpage of the mirror substrate 13 on micromirrors 15a-15n. As a result, the influence of the warpage of the mirror substrate 13 on the micromirrors 15a-15n is prevented. COPYRIGHT: (C)2011,JPO&INPIT
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