| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type acceleration sensor, capable of protecting destruction due to collision between a movable part and a fixed part, when acceleration exceeding an allowable displacement value is added of the movable part. SOLUTION: The capacitance type acceleration sensor includes a displaceable plumb bob 36 arranged on a substrate 35 under a dividing condition, a movable electrode 34 prepared on the plumb bob 36, a fixed electrode 33 prepared to face the movable electrode 34 to detect a change of the capacitance between both the electrodes 33 and 34 based on a displacement of the plumb bob 36. A complementary type ratcher regulating a displacement of the plumb bob 36 in the horizontal direction and a potential fixing device for fixing the potential to the complementary ratcher is prepared to both the plumb bob 36 and the substrate 35. The complementary ratcher includes a through hole 38 arranged on the plumb bob 36 and a locking member 37 arranged on the substrate 35 to be inserted into the through hole 38, so that a contact area at the time of collision is large, thereby preventing destruction due to stress concentration. COPYRIGHT: (C)2011,JPO&INPIT |
