| 摘要 |
PROBLEM TO BE SOLVED: To constitute a gas conveying device in which spark discharge between linear electrodes is prevented to avoid destruction of an electrode and an insulating film in the vicinity of the electrode. SOLUTION: The linear electrodes 52 mutually parallel with a dielectric substrate 51 are arranged. These linear electrodes 52 are common connected at every four pieces in the arrangement order, and each of then is connected to an output terminal of a periodic pulse power supply 40. On the whole surface of the dielectric substrate 51, the insulating film 54, such as resin coating or silica glass coating, is formed so as to cover the linear electrode 52. Pulse voltages V<SB>1</SB>-V<SB>4</SB>of four phases are output from the periodic pulse power supply 40. Additional capacitors C<SB>PQ</SB>are connected to the respective linear electrodes 52 in series so that an output voltage of this periodic pulse power supply 40 is applied to the linear electrodes 52 via the additional capacitors C<SB>PQ</SB>. COPYRIGHT: (C)2011,JPO&INPIT |
