| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To minimize artifacts not resulting from an object to be examined but contained in represented images, in particular, FFT images, etc. <P>SOLUTION: The invention relates to a method for producing a representation of an object by means of a particle beam, and a particle beam device. Raster patterns to be used for producing an image include optional raster patterns defined by sequential scanning, specific sequence, or a rectangular or spiral shape. At least one of the pixel life (life of raster point), flyback time, and pixel pause time is varied in raster patterns. It is also possible to vary the flyback time using a random number generator or to pass an individual raster point by a random method. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
