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发明名称
PROCESS FOR FABRICATING A MULTILAYER STRUCTURE WITH TRIMMING USING THERMO-MECHANICAL EFFECTS
摘要
申请公布号
KR20110099626(A)
申请公布日期
2011.09.08
申请号
KR20110006514
申请日期
2011.01.21
申请人
S.O.I TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
VAUFREDAZ ALEXANDRE;MOLINARI SEBASTIEN
分类号
H01L21/50
主分类号
H01L21/50
代理机构
代理人
主权项
地址
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