| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck table sealing mechanism of a machining device, capable of completely preventing intrusion of water without a sliding part. SOLUTION: The chuck table sealing mechanism includes: a water cover 52 having a circular opening 53 into which a chuck table base 58 is inserted and covering the upper of a rotary driving part 56 to protect the rotary driving part 56 against a liquid; an inner cylindrical member 60 standing around the circular opening 53 of the water cover 52; a plurality of annular internal flange members 62 formed to extend radially outward on the outer peripheral surface of the inner cylindrical member 60; an outer cylindrical member 66 attached to the chuck table base 58 to suspend from the chuck table base 58 at a predetermined interval from the internal flange member 62 radially outward; and an annular external flange member 68 extending radially outward from the lower end of the outer cylindrical member 66 with a predetermined clearance from the upper surface of the water cover 52. COPYRIGHT: (C)2011,JPO&INPIT |
