发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device includes an isolation region, a semiconductor region, a groove, and an insulating film. The semiconductor region is defined by the isolation region. The groove is in the semiconductor region. The groove has first and second ends. At least one of the first and second ends reaches the isolation region. The insulating film is in the groove.
申请公布号 US2011215391(A1) 申请公布日期 2011.09.08
申请号 US201113040871 申请日期 2011.03.04
申请人 ELPIDA MEMORY, INC. 发明人 TAKAISHI YOSHIHIRO
分类号 H01L27/108;H01L23/58;H01L29/78 主分类号 H01L27/108
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